Session SS SMART SENSOR MATERIALS AND TECHNOLOGIES SS-01 (Invited Talk) About Processes and Performance of Integrated Gas Sensor Components

The integration of gas sensor components into smart phones, tablets, and wrist watches will revolutionize the environmental health and safety industry by providing individuals the ability to detect harmful chemicals and pollutants in the environment using always-on hand-held devices. However, in order for this goal to be achieved the fabrication of gas sensors and, more precisely, the deposition of gas sensing metal-oxide materials, must be performed using a cost-effective technique which is integrable in the full CMOS sequence [1]. A sensor array requires a combination of MEMS and CMOS analog and digital circuitry in order to generate a useful product, as shown in Fig. 1.